5英寸C面（0001）蓝宝石晶片不像其他标准规格的晶片那么常见。但是我们采用光学一级材料（99.999%高纯度Al2O3单晶）能生产出优良的表面光洁度和平整度的高品质5英寸晶片，通常C-plane（0001）粗糙度小于0.2 nm（通过AFM）。
或者如果您需要特殊晶向、厚度、尺寸的定制化的蓝宝石晶片，请随时与我们联系。我们将以极具竞争力的成本为您提供高表面质量的蓝宝石晶片。
Specifications of 5英寸C面（0001）蓝宝石晶片
| Item | 5-inch C-plane(0001) 650μm Sapphire Wafers | |
| Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
| Grade | Prime, Epi-Ready | |
| Surface Orientation | C-plane(0001) | |
| C-plane off-angle toward M-axis 0.2 +/- 0.1° | ||
| Diameter | 125.0 mm +/- 0.1 mm | |
| Thickness | 650 μm +/- 25 μm | |
| Primary Flat Orientation | A-plane(11-20) +/- 0.2° | |
| Primary Flat Length | 42.0 mm +/- 1.0 mm | |
| Single Side Polished | Front Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
| (SSP) | Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm |
| Double Side Polished | Front Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
| (DSP) | Back Surface | Epi-polished, Ra < 0.2 nm (by AFM) |
| TTV | < 20 μm | |
| BOW | < 20 μm | |
| WARP | < 20 μm | |
| Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, single piece packaging. | |
注：可依据客户需求定制生产任意晶向、厚度的蓝宝石晶片。
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